Structural Effects on a Submicron Trench Process
- Daeje Chin
- Sang H. Dhong
- et al.
- 2019
- JES
Paper
Publications
24860 results for Exploratory Science
The Microstructure of Transition Metal/Al(Cu) Layers
- H.-C.W. Huang
- M. Wittmer
- et al.
- 2019
- JES
PaperParamagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II. a-SiNx:H
- F.C. Rong
- E.H. Poindexter
- 2019
- JES
PaperGrowth of Facet-Free Selective Silicon Epitaxy at Low Temperature and Atmospheric Pressure
- T.O. Sedgwick
- P. Agnello
- et al.
- 2019
- JES
PaperOxygen Exchange on Platinum Electrodes in Zirconia Cells: Location of Electrochemical Reaction Sites
- James N. Michaels
- Neil L. Robertson
- 2019
- JES
PaperDiffusion of Ion-Implanted Arsenic in Thermally Grown SiO2Films
- D.R. Young
- H. Kräutle
- et al.
- 2019
- JES
PaperElectro-oxidation of some soluble alkyl and aryl substituted polysilane homopolymers
- A. Diaz
- M. Baier
- et al.
- 2019
- JES
PaperHexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride Films
- R.C. Taylor
- B.A. Scott
- 2019
- JES
PaperMeasurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- W.D. Hinsberg
- C.G. Willson
- et al.
- 2019
- JES
PaperSelective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
Paper