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- 2009
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Conference paper
Publications
14460 results for Physical Sciences
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
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- SPIE Advanced Lithography 2009
Conference paper22 nm technology node active layer patterning for planar transistor devices
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- Steven Holmes
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperContact mask optimization and SRAF design
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- SPIE Advanced Lithography 2009
Conference paperQuantitative measurement of resist outgassing during exposure
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- Frances A. Houle
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperSource optimization for three-dimensional image designs through film stacks
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- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperExperimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
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- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperIntensive optimization of masks and sources for 22nm lithography
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- David O. Melville
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperGrowth kinetics of si and ge nanowires
- S. Kodambaka
- J. Tersoff
- et al.
- 2009
- SPIE OPTO 2009
Conference paperGating of a three-leg molecule
- Norton D. Lang
- Paul M. Solomon
- 2009
- ACS Nano
Paper