Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- Gottlieb S. Oehrlein
- J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- Gottlieb S. Oehrlein
- Kevin K. Chan
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- A. Charai
- S.E. Harnstram
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCalculation of postionization probabilities as a function of plasma parameters in electron gas secondary neutral mass spectrometry
- A. Wucher
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperControl of microstructure and properties of copper films using ion-assisted deposition
- R.A. Roy
- J.J. Cuomo
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDiffusion of boron, phosphorus, and arsenic implanted in thin films of cobalt disilicide
- O. Thomas
- P. Gas
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperValence-band photoemission and electron energy-loss studies of reactive ion etched silicon dioxide
- S.W. Robey
- G.S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAtomic force microscopy using optical interferometry
- R. Erlandsson
- G.M. Mcclelland
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMagnetron plasma diagnostics and processing implications
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAngular distribution of particles sputtered from metals and alloys
- A. Wucher
- W. Reuter
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper