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- International Journal of Modern Physics B
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Publications
14460 results for Physical Sciences
Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C4 F 8 - And CF4 -based discharges
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- Physical Review B - CMMP
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- MRS Spring Meeting 2009
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- J.S. Washington
- E. Joseph
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- MRS Spring Meeting 2009
Conference paper