Dopant Diffusion in Self-Aligned Silicide/Silicon Structures
- Marc Wittmer
- 2019
- JES
Paper
Publications
24897 results for Exploratory Science
Redeposition during Deep Trench Etching
- Jacob Jorne
- 2019
- JES
PaperOxidation of Plasma-Deposited α-SixC1-x:H Films
- J.M. Eldridge
- J.O. Moore
- et al.
- 2019
- JES
PaperVarious Properties of Sputter-Deposited HfB2 Films
- J.M. Eldridge
- A.R. Forouhi
- et al.
- 2019
- JES
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- Dario Narducci
- C. Richard Guarnieri
- et al.
- 2019
- JES
PaperThermally Developable, Positive Tone, Oxygen RIE Barrier Resist for Bilayer Lithography
- Hiroshi Ito
- Mitsuru Ueda
- et al.
- 2019
- JES
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- Eugene J. M. O'Sullivan
- James R. White
- 2019
- JES
PaperMaskless Laser Patterning for Gold Plating of Microelectronic Materials
- R.J. von Gutfeld
- M.H. Gelchinski
- et al.
- 2019
- JES
PaperHigh temperature process limitation on TiSi2
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 2019
- JES
PaperOxide Passivation of Photochemically Unpinned GaAs
- C.W. Wilmsen
- Alan C. Warren
- et al.
- 2019
- JES
Paper