Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- Scott Halle
- Daniel Moore
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
9289 results for Computer Science
Performance of multi-process and multi-thread processing on multi-core SMT processors
- Hiroshi Inoue
- Toshio Nakatani
- 2010
- IISWC 2010
Conference paperPerformance variations of two open-source cloud platforms
- Yohei Ueda
- Toshio Nakatani
- 2010
- IISWC 2010
Conference paperQuality of IT service delivery - Analysis and framework for human error prevention
- Laura Shwartz
- Daniela Rosu
- et al.
- 2010
- SOCA 2010
Conference paperSystemT: An algebraic approach to declarative information extraction
- Laura Chiticariu
- Rajasekar Krishnamurthy
- et al.
- 2010
- ACL 2010
Conference paper+Spaces: Intelligent virtual spaces for eGovernment
- Konstantinos Tserpes
- Michal Jacovi
- et al.
- 2010
- IE 2010
Conference paperAvatars meet meetings: Design issues in integrating avatars in distributed corporate meetings
- N. Sadat Shami
- Li-Te Cheng
- et al.
- 2010
- GROUP 2010
Conference paperImproving mention detection robustness to noisy input
- Radu Florian
- John F. Pitrelli
- et al.
- 2010
- EMNLP 2010
Conference paperWe are all lurkers: Consuming behaviors among authors and readers in an enterprise file-sharing service
- Michael Muller
- N. Sadat Shami
- et al.
- 2010
- GROUP 2010
Conference paperStreaming workload generator for testing billing mediation platform in telecom industry
- Eric Bouillet
- Parijat Dube
- 2010
- WSC 2010
Conference paper