Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Paper
Publications
24897 results for Exploratory Science
A TEM Study of the Effect of Accelerators on Pd-Sn Colloidal Catalysts and on the Initiation of Electroless Cu Deposition on Epoxy
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- JES
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- V. Brusic
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- 2019
- JES
PaperCorrosion of Thin Film Magnetic Disk: Galvanic Effects of the Carbon Overcoat
- D. Edmonson
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- et al.
- 2019
- JES
PaperHeating Effects In Reactive Etching Of Nb And Nb205
- Young H. Lee
- 2019
- JES
PaperConducting Transition Metal Oxides: Possibilities for RuO2in VLSI Metallization
- L. Krusin-Elbaum
- M. Wittmer
- 2019
- JES
PaperMechanisms of Electroless Metal Plating II. Formaldehyde Oxidation
- Perminder Bindra
- Judith Roldan
- 2019
- JES
PaperMigration Considerations in Chronopotentiometric Analysis
- Huk Y. Cheh
- 2019
- JES
PaperPhotochemically Generated Gold Catalyst for Selective Electroless Plating of Copper
- Thomas H. Baum
- 2019
- JES
PaperReactive Ion Etching in SF6 Gas Mixtures
- R. Pinto
- R.S. Babu
- 2019
- JES
Paper