Impurity measurements in silicon with D-SIMS and atom probe tomography
- P.A. Ronsheim
- P. Flaitz
- et al.
- 2008
- Applied Surface Science
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Publications
14465 results for Physical Sciences
Ultra low-k films derived from hyperbranched polycarbosilanes (HBPCS)
- Jitendra S. Rathore
- Leonard V. Interrante
- et al.
- 2008
- Advanced Functional Materials
PaperThe limitations of high index resists for 193nm hyper-NA lithography
- Gregory McIntyre
- Daniel Sanders
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperResist freezing process for double exposure lithography
- Kuang-Jung Rex Chen
- Wu-Song Huang
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperGraded spin-on organic bottom antireflective coating for high NA lithography
- Dario L. Goldfarb
- Sean D. Burns
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperA new class of low bake resists for 193-nm immersion lithography
- Ratnam Sooriyakumaran
- Richard DiPietro
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperRise of chemical amplification resists from laboratory curiosity to paradigm enabling Moore's law
- Hiroshi Ito
- 2008
- SPIE Advanced Lithography 2008
Conference paperLactones in 193 nm resists: What do they do?
- Hiroshi Ito
- Hoa D. Truong
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperSupramolecular assembly of block copolypeptides with semiconductor nanocrystals
- Bayu Atmaja
- Jennifer N. Cha
- et al.
- 2008
- Langmuir
PaperThin film nanotube transistors based on self-assembled, aligned, semiconducting carbon nanotube arrays
- Michael Engel
- Joshua P. Small
- et al.
- 2008
- ACS Nano
Paper