Transient fluorocarbon film thickness effects near the silicon dioxide/silicon interface in selective silicon dioxide reactive ion etching
- Mark A. Jaso
- Gottlieb S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3549 results for Materials Discovery
High-rate reactive sputter deposition of zirconium dioxide
- Fletcher Jones
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermostability and photodesorption of Langmuir-Blodgett films
- P. Tippmann-Krayer
- L.A. Laxhuber
- et al.
- 1988
- Thin Solid Films
Valence-band photoemission and electron energy-loss studies of reactive ion etched silicon dioxide
- S.W. Robey
- G.S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion and interface investigation of polyimide on metals
- Y.-H. Kim
- J. Kim
- et al.
- 1988
- Journal of Adhesion Science and Technology
Preparation and X-ray characterization of superconducting and related Tl2Ba2CuO6 phases
- T.C. Huang
- V.Y. Lee
- et al.
- 1988
- Materials Research Bulletin
Summary Abstract: Desorption dynamics of SiF4etch product
- F.A. Houle
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In-situ grazing incidence X-ray diffraction study of electrochemically deposited Pb monolayers on Ag(111)
- Mahesh G. Samant
- Michael F. Toney
- et al.
- 1988
- Surface Science
Local structure investigation of the ion sputtered oxide substrates
- Y.S. Chaug
- Y.H. Kim
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dielectrics on semiconductors
- F.J. Himpsel
- U.O. Karlsson
- et al.
- 1988
- Materials Science and Engineering B