Diffusion of boron, phosphorus, and arsenic implanted in thin films of cobalt disilicide
- O. Thomas
- P. Gas
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3555 results for Materials Discovery
Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface
- Stephen M. Gates
- 1988
- Surface Science
PaperGas density reduction effects in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperComplex formation and growth at the Cr and Cu-polyimide interface
- R. Haight
- R.C. White
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Desorption dynamics of SiF4etch product
- F.A. Houle
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperPhotothermal spectroscopy of dye-monolayer assemblies on solid substrates
- Wolfgang Knoll
- Hans J. Coufal
- 1988
- Thin Solid Films
PaperImage processing techniques for obtaining registration information with scanning tunneling microscopy
- R.J. Wilson
- S. Chiang
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperValence-band photoemission and electron energy-loss studies of reactive ion etched silicon dioxide
- S.W. Robey
- G.S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermostability and photodesorption of Langmuir-Blodgett films
- P. Tippmann-Krayer
- L.A. Laxhuber
- et al.
- 1988
- Thin Solid Films
PaperMetal-polymer chemistry. I. Charge-transfer-related modifications of polyimide (pyromellitic dianhydride-4,4'-oxydianiline)
- J.G. Clabes
- M.J. Goldberg
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper