Massively-parallel FDTD simulations to address mask electromagnetic effects in Hyper-NA immersion lithography
- Jaione Tirapu Azpiroz
- Geoffrey W. Burr
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
14460 results for Physical Sciences
Nature of the constant factor in the relation between radial breathing mode frequency and tube diameter for single-wall carbon nanotubes
- P.T. Araujo
- I.O. Maciel
- et al.
- 2008
- Physical Review B - CMMP
Paper32 NM Logic patterning options with immersion lithography
- K. Lai
- S. Burns
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperRadiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperMonitoring polarization at 193nm high-numerical aperture with phase shift masks: Experimental results and industrial outlook
- Gregory McIntyre
- Richard Tu
- 2008
- SPIE Advanced Lithography 2008
Conference paperThe comparison of OPC performance and run time for dense versus sparse solutions
- Amr Abdo
- Ian Stobert
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperMeasuring layer-specific depth-of-focus requirements
- Bernhard Liegl
- Allen Gabor
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperMetastable magnetism and memory effects in dilute magnetic semiconductors
- A. Ney
- R. Rajaram
- et al.
- 2008
- Journal of Physics Condensed Matter
PaperIntegration of optical I/O with organic chip packages
- Bert J. Offrein
- Christoph Bergen
- et al.
- 2008
- SPIE Photonics Europe 2008
Conference paperLocation dependent heuristics for sensor coverage planning
- 2008
- Defense Transformation and Net-Centric System 2008
Conference paper