Radiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
14465 results for Physical Sciences
Measuring layer-specific depth-of-focus requirements
- Bernhard Liegl
- Allen Gabor
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperMetastable magnetism and memory effects in dilute magnetic semiconductors
- A. Ney
- R. Rajaram
- et al.
- 2008
- Journal of Physics Condensed Matter
PaperIntegration of optical I/O with organic chip packages
- Bert J. Offrein
- Christoph Bergen
- et al.
- 2008
- SPIE Photonics Europe 2008
Conference paperLocation dependent heuristics for sensor coverage planning
- 2008
- Defense Transformation and Net-Centric System 2008
Conference paperA biologically-inspired MANET architecture
- Aaron Kershenbaum
- Vasilieos Pappas
- et al.
- 2008
- Defense Transformation and Net-Centric System 2008
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- Vasilieos Pappas
- Dinesh Chandra Verma
- et al.
- 2008
- Defense Transformation and Net-Centric System 2008
Conference paperControlling linewidth roughness in step and flash imprint lithography
- Gerard M. Schmid
- Niyaz Khusnatdinov
- et al.
- 2008
- EMLC 2008
Conference paperExtension of depth of field in integral imaging using amplitude and phase modulation of the pupil function
- Saeed Bagheri
- Bahram Javidi
- 2008
- SPIE Defense + Security 2008
Conference paperPolicy enabled interconnection of sensor networks using a message queue infrastructure
- Dinesh Chandra Verma
- Greg Cirincione
- et al.
- 2008
- Defense Transformation and Net-Centric System 2008
Conference paper