Extendibility study of a PVD Cu seed process with Ar+ Rf-Plasma enhanced coverage for 45nm interconnects
- Andrew H. Simon
- Tibor Bolom
- et al.
- 2008
- MRS Spring Meeting 2008
Conference paper
Publications
14465 results for Physical Sciences
Orientation of individual C60 molecules adsorbed on Cu(111): Low-temperature scanning tunneling microscopy and density functional calculations
- J. Andreas Larsson
- Simon D. Elliott
- et al.
- 2008
- Physical Review B - CMMP
PaperMolecular mechanisms of cryoprotection in aqueous proline: light scattering and molecular dynamics simulations
- R.Z. Troitzsch
- H. Vass
- et al.
- 2008
- Journal of Physical Chemistry B
PaperScanning tunneling spectroscopy of individual PbSe quantum dots and molecular aggregates stabilized in an inert nanocrystal matrix
- Karin Overgaag
- Peter Liljeroth
- et al.
- 2008
- ACS Nano
PaperEffect of structural anisotropy on the coarsening kinetics of diblock copolymer striped patterns
- R. Ruiz
- J.K. Bosworth
- et al.
- 2008
- Physical Review B - CMMP
PaperThe biphenyl molecule as a model transistor
- Paul M. Solomon
- Norton D. Lang
- 2008
- ACS Nano
PaperStrong suppression of electrical noise in bilayer graphene nanodevices
- Yu-Ming Lin
- Phaedon Avouris
- 2008
- Nano Letters
PaperLattice modes in the ferroelectric perovskites (Pb1–x Srx) TiO3
- Gerald Burns
- F.H. Dacol
- 2008
- Journal of Raman Spectroscopy
PaperMolecular recognition with DNA nanoswitches: Effects of single base mutations on structure
- C.P. Mountford
- A.H. Buck
- et al.
- 2008
- Journal of Physical Chemistry B
PaperDecomposition and analysis of process variability using constrained principal component analysis
- Ongyeun Cho
- Daeik D. Kim
- et al.
- 2008
- IEEE Trans Semicond Manuf
Paper