The feasibility of using image parameters for test pattern selection during OPC model calibration
- Amr Abdo
- Ramya Viswanathan
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
9289 results for Computer Science
Toward perfect on-wafer pattern placement: Stitched overlay exposure tool characterization
- Christopher P. Ausschnitt
- Timothy A. Brunner
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperOverlay characterization and matching of immersion photoclusters
- Blandine Minghetti
- Timothy Brunner
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperConcepts and experiments for optimizing wide-input streaming CRC circuits
- Andreas Döring
- 2010
- ARCS 2010
Conference paperTight bounds for delay-sensitive aggregation
- Yvonne Anne Pignolet
- Stefan Schmid
- et al.
- 2010
- Discrete Mathematics and Theoretical Computer Science
PaperWildcarded identity-based encryption
- Michel Abdalla
- James Birkett
- et al.
- 2010
- Journal of Cryptology
PaperSimulation optimization using the cross-entropy method with optimal computing budget allocation
- Donghai He
- Loo Hay Lee
- et al.
- 2010
- ACM TOMACS
PaperOn suitability of euclidean embedding for host-based network coordinate systems
- Sanghwan Lee
- Zhi-Li Zhang
- et al.
- 2010
- IEEE/ACM TON
PaperService-oriented enterprise interoperability in automobile supply chain management
- Yong Zhang
- Shijun Liu
- et al.
- 2010
- Computer Science and Information Systems
PaperA plant location guide for the unsure: Approximation algorithms for min-max location problems
- Barbara Anthony
- Vineet Goyal
- et al.
- 2010
- Mathematics of Operations Research
Paper