Paving the way to a full chip gate level double patterning application
- Henning Haffner
- Jason Meiring
- et al.
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
Conference paper
Publications
14462 results for Physical Sciences
Waveform relaxation for the parallel solution of large PEEC model problems
- Giulio Antonini
- Jonas Ekman
- et al.
- 2007
- EMC 2007
Conference paperUnderstanding mask-edge and trench-edge defects produced during solid phase epitaxy of amorphized regions in (001) and (Oil) Si: Observations and model
- Katherine L. Saenger
- Haizhou Yin
- et al.
- 2007
- MRS Spring 2007
Conference paperCaustic surfaces in a Keplerian two-lens beam shaper
- John A. Hoffnagle
- David L. Shealy
- 2007
- SPIE Photonic Devices + Applications 2007
Conference paperLow-cost electro-optical package for use with PCB-embedded waveguides
- Jonas Weiss
- Christoph Berger
- et al.
- 2007
- Optics East 2007
Conference paperExtendibility of NiPt silicide contacts for CMOS technology demonstrated to the 22-nm node
- Kazuya Ohuchi
- Christian Lavoie
- et al.
- 2007
- IEDM 2007
Conference paperInstantaneous electrodeposition of metal nanostructures on mass carbon nanotubes
- Xin Wei
- Bachlien Dang
- et al.
- 2007
- International SAMPE Technical Conference 2007
Conference paperCapacitance investigation of diodes and SCRs for ESD protection of high frequency circuits in sub-100nm bulk CMOS technologies
- Junjun Li
- Robert Gauthier
- et al.
- 2007
- EOS/ESD 2007
Conference paperBetter on wafer performance and mask manufacturability of contacts with no or non-traditional serifs
- Donald Samuels
- Ian Stobert
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
Conference paperTunable diode protection for GMR and TMR sensors
- Icko Eric Timothy Iben
- Stanley Czarnecki
- et al.
- 2007
- EOS/ESD 2007
Conference paper