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- Jason Meiring
- et al.
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
Conference paper
Publications
14462 results for Physical Sciences
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- et al.
- 2007
- ACS Nano
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- Christian L. Degen
- et al.
- 2007
- Physical Review B - CMMP
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- B.P. Andreasson
- M. Janousch
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- 2007
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- Marco Bellini
- Peng Cheng
- et al.
- 2007
- SPIE International Symposium on Fluctuations and Noise 2007
Conference paperTrends in patterning materials for advanced lithography
- Robert D. Allen
- 2007
- J. Photopolym. Sci. Tech.
ReviewChemical amplification resists: Laboratory curiosity to paradigm
- Hiroshi Ito
- 2007
- J. Photopolym. Sci. Tech.
ReviewInterfacial fluctuations of block copolymers: A coarse-grain molecular dynamics simulation study
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- William C. Swope
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- 2007
- Journal of Physical Chemistry B
PaperLuminescence-center-mediated excitation as the dominant Er sensitization mechanism in Er-doped silicon-rich Si O2 films
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- Forrest R. Ruhge
- et al.
- 2007
- Physical Review B - CMMP
Paper