Novolac based deep-uv resists
- Dennis R. McKean
- Scott A. Macdonald
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
3606 results for Mathematical Sciences
Sub-picosecond raman spectroscopy of semiconductors
- J.C. Tsang
- J.A. Kash
- 1989
- Proceedings of SPIE 1989
Conference paperReading and writing of photochemical holes using gaalas diode lasers
- P. Pokrowsky
- W.E. Moerner
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperPractical characterization of 0.5 μm optical lithography
- Donis G. Flagello
- Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Conference paperSoft x-ray diffraction of striated muscle
- S.F. Fan
- W.B. Yun
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperCritical issues in high density magnetic and optical data storage
- Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Conference paperCondenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Conference paperBench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperZero-Misalignment lithographic process using a photoresist with wavelength-selected tone
- William D. Hinsberg
- Scott A. MacDonald
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperMetrology with an atomic force microscope
- P.C.D. Hobbs
- H.K. Wickramasinghe
- 1989
- Proceedings of SPIE 1989
Conference paper