Sensitive electron beam resist systems based on acid-catalyzed deprotection
- Hiroshi Ito
- Lester A. Pederson
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
3613 results for Mathematical Sciences
Laser photothermal effects for measurements and materials processing
- Andrew C. Tam
- 1989
- SPIE OE/LASE 1989
Conference paperA suprathreshold ferry-porter law: Implications for the measurement of display flicker
- Bernice E. Rogowitz
- 1989
- Proceedings of SPIE 1989
Conference paperSecond-harmonic diffraction from periodically modulated molecular monolayers
- T.F. Heinz
- T. Suzuki
- 1989
- Proceedings of SPIE 1989
Conference paperThe role of unsteady adiabatic expansion in laser sputtering
- Roger Kelly
- 1989
- Proceedings of SPIE 1989
Conference paperAblation of polymers and tissue by ultraviolet lasers
- R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Conference paperGel resist processing for submicron CMOS and bipolar circuits
- K.E. Petrillo
- M. Smyth
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperTwo-regime ablative hole formation process in tellurium and tellurium-alloy films
- M. Chen
- V. Marrello
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperChemical and physical aspects of multilayer resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperAqueous developable, negative working resist made of chlorinated novolac resin
- H. Hiraoka
- A.M. Patlach
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper