Publications

101 results at Proceedings of SPIE - The International Society for Optical Engineering

Fabrication of dual damascene BEOL structures using a Multi-Level Multiple Exposure (MLME) scheme - Part 1. Lithographic patterning
- - Dario L. Goldfarb
  - Stefan Harrer
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Process characterization of pitch-split resist materials for application at 16nm node
- - Steven J. Holmes
  - Cherry Tang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- - Stefan Harrer
  - John C Arnold
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Lasing from defect states in mixed-order organic laser structures
- - K. Baumann
  - Gabriele Raino
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- - G.M. Wallraff
  - Carl E. Larson
  - et al.
- 2007
- Proceedings of SPIE 2007
Conference paper
The role of copper-phthalocyanine in multilayer organic LEDs based on small molecules
- - Heike Riel
  - Tilman A. Beierlein
  - et al.
- 2002
- Proceedings of SPIE 2002
Conference paper
IBM 9.2-Megapixel flat-panel display: Technology and infrastructure
- - Steven L. Wright
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Indexing technique for similarity matching in large video databases
- - Sanghyun Park
  - June-Suh Cho
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Issues with inferring internet topological attributes
- - Lisa Amini
  - Anees Shaikh
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Automated video summarization using speech transcripts
- - Cuneyt M. Taskiran
  - Arnon Amir
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Paper