Properties and Microelectronic Applications of Thin Films of Refractory Metal Nitrides
- Marc Wittmer
- 1985
- JVSTA
Paper
Publications
3553 results for Materials Discovery
Highly selective argon-oxygen ion beam etching process for Pb alloys
- D.F. Moore
- H.P. Dietrich
- et al.
- 1985
- JVSTA
PaperPhotoemission spectroscopy study of aluminum-polyimide interface
- J.W. Bartha
- P.O. Hahrt
- et al.
- 1985
- JVSTA
PaperHistory of the modern cryopump
- M.C. Bridwell
- J.G. Rodes
- 1985
- JVSTA
PaperStructure and properties of coevaporated WSix films
- K.Y. Ahn
- S.R. Herd
- et al.
- 1985
- JVSTA
PaperChemical bonding and reaction at metal/polymer interfaces
- P.S. Ho
- P.O. Hahn
- et al.
- 1985
- JVSTA
PaperSummary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- M. Liehr
- P.A. Thiry
- et al.
- 1985
- JVSTA
PaperAblative photodecomposition of polymers
- R. Srinivasan
- 1985
- JVSTA
PaperEffect of ion bombardment during deposition on the x-ray microstructure of thin silver films
- T.C. Huang
- G. Lim
- et al.
- 1985
- JVSTA
PaperReactive sputtering of copper and silicon near the sputtering threshold
- T.M. Mayer
- J.M.E. Harper
- et al.
- 1985
- JVSTA
Paper