Ultra-thin SOI CMOS using laser spike anneal
- Zhibin Ren
- J. Sleight
- et al.
- 2006
- VLSI-TSA 2006
Conference paper
Publications
14465 results for Physical Sciences
Fundamental power and frequency limits of deeply-scaled CMOS for RF power applications
- Jörg Scholvin
- David R. Greenberg
- et al.
- 2006
- IEDM 2006
Conference paperMastering double exposure process window aware OPC by means of virtual targets
- Henning Haffner
- Zachary Baum
- et al.
- 2006
- SPIE Photomask Technology 2006
Conference paperIn situ electron microscopy as a tool for imaging the growth of nanostructures
- S. Kodambaka
- F.M. Ross
- et al.
- 2006
- MRS Fall Meeting 2006
Conference paperA 0.127 μm2 high performance 65 nm SOI based embedded DRAM for on-processor applications
- G. Wang
- K. Cheng
- et al.
- 2006
- IEDM 2006
Conference paperStructure, design and process control for Cu bonded interconnects in 3D integrated circuits
- Kuan-Neng Chen
- Sang Hwui Lee
- et al.
- 2006
- IEDM 2006
Conference paperA 45 nm CMOS node Cu/low-k/ ULtra low-k PECVD SiCOH (k=2.4) BEOL technology
- S. Sankaran
- S. Arai
- et al.
- 2006
- IEDM 2006
Conference paperFundamental understanding and optimization of PBTI in nFETs with SiO 2/HfO2 gate stack
- E. Cartier
- B.P. Linder
- et al.
- 2006
- IEDM 2006
Conference paperUltra-thin phase-change bridge memory device using GeSb
- Y.C. Chen
- C.T. Rettner
- et al.
- 2006
- IEDM 2006
Conference paperChallenges and opportunities for high performance 32 nm CMOS technology
- J. Sleight
- I. Lauer
- et al.
- 2006
- IEDM 2006
Conference paper