Modeling and simulation of transistor performance shift under pattern-dependent RTA process
- Yun Ye
- Frank Liu
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paper
Publications
9289 results for Computer Science
Compensating non-optical effects using electrically-driven optical proximity correction
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperParameter-specific electronic measurement and analysis of sources of variation using ring oscillators
- Lynn T.-N. Wang
- Liang-Teck Panga
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperThe measurement uncertainty challenge of advanced patterning development 727203
- Narender Rana
- Chas Archie
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperResist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture
- Gregory McIntyre
- Richard Tu
- 2009
- SPIE Advanced Lithography 2009
Conference paperCr migration on 193nm binary photomasks
- John Bruley
- Geoffrey Burr
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperRegret and convergence bounds for a class of continuum-armed bandit problems
- Eric W. Cope
- 2009
- IEEE TACON
PaperStateless distributed gradient descent for positive linear programs.
- Baruch Awerbuch
- Rohit Khandekar
- 2009
- SIAM Journal on Computing
PaperExploring visual and motor accessibility in navigating a virtual world
- Shari Trewin
- Mark Laff
- et al.
- 2009
- ACM TACCESS
PaperImproved lower bounds for embeddings into l 1
- Robert Krauthgamer
- Yuval Rabani
- 2009
- SIAM Journal on Computing
Paper