Numerical analyses of the roles of gas phase and liquid phase UV photochemistry in conventional and immersion 193 nm lithography
- William Hinsberg
- Frances A. Houle
- 2006
- J. Photopolym. Sci. Tech.
Paper
Publications
14465 results for Physical Sciences
Fundamental properties of fluoroalcohol-methacrylate polymers for use in 193nm lithography
- R.D. Allen
- G. Breyta
- et al.
- 2006
- J. Photopolym. Sci. Tech.
PaperTemplated germanium nanowire synthesis using oriented mesoporous organosilicate thin films
- Hemanth Jagannathan
- Michael Deal
- et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCharacterization of poly(norbornene) dendronized polymers prepared by ring-opening metathesis polymerization of dendron bearing monomers
- Andreas Nyström
- Michael Malkoch
- et al.
- 2006
- Macromolecules
PaperAngle-resolved photoemission from CdTe(110) and Cd0.65Mn0.35Te(110)
- Hua Qu
- J. Kanski
- et al.
- 2006
- Physica Scripta
PaperA scanning photoelectron microscope (SPEM) at the NSLS
- Harald Ade
- Janos Kirz
- et al.
- 2006
- Physica Scripta
PaperThe geometry of lattice images of steps and dislocations
- D.A. Smith
- P.J. Goodhew
- 2006
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
PaperCombined FIM/TEM determination of the structure of an incoherent twin boundary in tungsten
- P.A. Beaven
- D.A. Smith
- et al.
- 2006
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
PaperDisplacement vector and energy of a screw dislocation in a Lennard-Jones amorphous solid
- P. Chaudhari
- Paul J. Steinhardt
- 2006
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
PaperSecondary grain boundary dislocations in [001] twist boundaries in MgO I. Intrinsic structures
- C.P. Sun
- R.W. Balluffi
- 2006
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Paper