Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
Paper
Publications
26878 results for Science
Oxidation and Corrosion Studies of Fe1-xPdx Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
PaperReversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
- S.I. Raider
- L.E. Forget
- et al.
- 2019
- JES
PaperLuminescence of Silica Glasses Containing Copper
- J.M. Brownlow
- I.F. Chang
- 2019
- JES
PaperRIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
PaperInfluence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
PaperInteractions Between Cr and Pt Films: New Cr-Pt Phases
- J.E.E. Baglin
- F.M. d'Heurle
- et al.
- 2019
- JES
PaperEffects of Ammonia Anneal on Electron Trappings in Silicon Dioxide
- D.W. Dong
- A. Hartstein
- 2019
- JES
PaperEllipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES
Paper