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- et al.
- 2019
- JES
Paper
Publications
26878 results for Science
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
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- JES
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- JES
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- JES
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- JES
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- JES
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- JES
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- K.S. Sachar
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- JES
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- A. Homola
- 2019
- JES
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