Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- R.S. Horwath
- 2019
- JES
Paper
Publications
26944 results for Science
Oxidation and Corrosion Studies of Fe1-xPdx Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
PaperSelf-Diffusion and Na-K Exchange in βand β”-Na-Gallate Fast Ion Conductors
- L.M. Foster
- D.R. Campbell
- et al.
- 2019
- JES
PaperPolymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
PaperThe Formation of SiO2 in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
PaperEllipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES
PaperPreparation and Electrical Properties of V2O3 Single Crystals of Controlled Stoichiometry
- S.A. Shivashankar
- R. Aragón
- et al.
- 2019
- JES
PaperEffect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- Takeshi Takamori
- Stephen Fine
- et al.
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposited Nife
- Jean Horkans
- 2019
- JES
PaperInfluence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
Paper