All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
Paper
Publications
26917 results for Science
On the Role of Buffers and Anions in NiFe Electrodeposition
- Jean Horkans
- 2019
- JES
PaperSilicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline Silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
PaperDeposition Techniques and Heat Transfer Properties of Porous Aluminum
- V.J. Silvestri
- K.S. Sachar
- 2019
- JES
PaperHigh Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
PaperParameter and Reactor Dependence of Selective Oxide RIE in CF4 + H2
- L.M. Ephroth
- E.J. Petrillo
- 2019
- JES
PaperPre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- M.C. Chen
- V.J. Silvestri
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: Measurement of the Diffusion of Oxidant in SiO2 Films
- E.A. Irene
- 2019
- JES
PaperEffects of Conductor Stress on Bubble Propagation in Contiguous Disk Devices
- K.Y. Ahn
- S.M. Kane
- 2019
- JES
PaperReversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
- S.I. Raider
- L.E. Forget
- et al.
- 2019
- JES
Paper