Hollow Cathode Etching of Si and SiO2 Using CF4 and H2
- G. Fortuño-Wiltshire
- G.S. Oehrlein
- 2019
- JES
Paper
Publications
26878 results for Science
Grazing Incidence X-Ray and Electrochemical Study of Thin Film Copper(111) on Mica
- Gary L. Barges
- Mahesh G. Samant
- 2019
- JES
PaperSelective dry etching of germanium with respect to silicon and vice versa
- G.S. Oehrlein
- T.D. Bestwick
- et al.
- 2019
- JES
PaperCalculation of Galvanic Currents and Potentials Using a p-Type Finite Element Method
- R.B. Morris
- 2019
- JES
PaperElectrical studies on annealed d2 plasma-exposed silicon
- A. Henry
- O.O. Awadelkarim
- et al.
- 2019
- JES
PaperSubmicron epitaxial films
- B. Ginsberg
- G.R. Srinivasan
- 2019
- JES
PaperDopant Diffusion in Self-Aligned Silicide/Silicon Structures
- Marc Wittmer
- 2019
- JES
PaperA Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- E. Bassous
- G. Pepper
- et al.
- 2019
- JES
PaperElectroactive Properties of Polyaromatic Molecules
- Joachim Bargon
- A. Diaz
- 2019
- JES
PaperDopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- K.M. Kim
- W.E. Langlois
- 2019
- JES
Paper