Publications

26917 results for Science

Plasma Etching of Silicon in SF₆: Experimental and Reactor Modeling Studies
- - Yeong-Jyh Lii
  - Jacob Jorné
  - et al.
- 2019
- JES
Paper
Elimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- - G.A. Rozgonyi
- 2019
- JES
Paper
The Effect of Cyanide on the Oxidation of Formaldehyde on Au, Cu, and Pd Electrodes
- - Jean Horkans
- 2019
- JES
Paper
Selective dry etching of germanium with respect to silicon and vice versa
- - G.S. Oehrlein
  - T.D. Bestwick
  - et al.
- 2019
- JES
Paper
A Two-Dimensional Process Model for Chemimechanical Polish Planarization
- - J. Warnock
- 2019
- JES
Paper
Oxidation of Plasma-Deposited α-Si_xC_1-x:H Films
- - J.M. Eldridge
  - J.O. Moore
  - et al.
- 2019
- JES
Paper
The Kinetics of Palladium Reduction at Particulate TiO₂ Photocatalysts
- - E.J.M. O'Sullivan
- 2019
- JES
Paper
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- - G.S. Oehrlein
  - J.G. Clabes
  - et al.
- 2019
- JES
Paper
Electrochemical and Metallurgical Aspects of Laser-Enhanced Jet Plating of Gold
- - M.H. Gelchinski
  - L. Romankiw
  - et al.
- 2019
- JES
Paper
Corrosion and Passivation of Fe and FeN Films
- - V. Brusic
  - G.S. Frankel
  - et al.
- 2019
- JES
Paper