X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2005
- Langmuir
Paper
Publications
14465 results for Physical Sciences
Strain relaxation in Si1-xGex thin films on Si (100) substrates: Modeling and comparisons with experiments
- Kedarnath Kolluri
- Luis A. Zepeda-Ruiz
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paperApplication of nanoindentation to characterize fracture in ILD films used in the BEOL
- Eva E. Simonyi
- E. Liniger
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paperThermal oxidation of Cu interconnects capped with CoWP
- J.P. Gambino
- S. Smith
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paperPressure dependence of the TO phonon frequency in hcp Zn
- S.L. Qiu
- F. Apostol
- et al.
- 2005
- Journal of Physics Condensed Matter
PaperStrongly coverage-dependent excitations of adsorbed molecular hydrogen
- J.A. Gupta
- C. Lutz
- et al.
- 2005
- Physical Review B - CMMP
PaperSearch for a local effect in multiatom resonant core excitation in a surface species: Photoemission and photon-stimulated desorption from N 2 on Ni(111)
- P. Feulner
- M. Ecker
- et al.
- 2005
- Physical Review B - CMMP
PaperLow-temperature tunneling spectroscopy of Ge(111)c(2x8) surfaces
- R.M. Feenstra
- S. Gaan
- et al.
- 2005
- Physical Review B - CMMP
PaperInterfacial interaction dependence of microdomain orientation in diblock copolymer thin films
- Ting Xu
- Craig J. Hawker
- et al.
- 2005
- Macromolecules
PaperEffect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature
- Marcus A. Worsley
- Stacey F. Bent
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper