Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
Paper
Publications
26917 results for Science
Polyaniline: A Very Fast Electrochromic Material
- J.C. Lacroix
- K.K. Kanazawa
- et al.
- 2019
- JES
PaperStructural Effects on a Submicron Trench Process
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- Sang H. Dhong
- et al.
- 2019
- JES
PaperPit Growth in Nife Thin Films
- B.M. Rush
- J. Dukovic
- et al.
- 2019
- JES
PaperElectrochemistry of Polysilanes with Bound Ferrocene
- Art Diaz
- Mark Seymour
- et al.
- 2019
- JES
PaperDopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- K.M. Kim
- W.E. Langlois
- 2019
- JES
PaperProduction and Characterization of Extremely Corrosion Resistant Chromium-Metalloid Alloys
- R.M. Latanision
- R.R. Ruf
- 2019
- JES
PaperThe Kinetics of Palladium Reduction at Particulate TiO2 Photocatalysts
- E.J.M. O'Sullivan
- 2019
- JES
PaperElectrical Properties of Chemical-Mechanical Polished Tetraethyl Orthosilicate Films with and Without Capping Layers
- S. Cohen
- M.A. Jaso
- et al.
- 2019
- JES
PaperEFFECT OF Cu ON THE KINETICS AND MICROSTRUCTURE OF Al3Ti FORMATION.
- M. Wittmer
- F. Le Goues
- et al.
- 2019
- JES
Paper