Ultrathin membrane, masks for electron projection lithography
- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper
Publications
14462 results for Physical Sciences
Dynamics of vapor bubbles in spherically symmetric temperature fields of general variation
- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperDynamics of vapor bubbles in binary liquids with spherically symmetric initial conditions
- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperCoSi2 formation in the presence of Ti, Ta or W
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Thin Solid Films
PaperEvaluation of thermal stability for CMOS gate metal materials
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2004
- JES
PaperDielectric tunability of BST:MgO composites prepared by using nano particles
- Shashnk Agrawal
- R. Guo
- et al.
- 2004
- Ferroelectrics, Letters Section
PaperSecond-order normal force brought about by polishing with a polyurethane pad
- Maria Ronay
- 2004
- JES
PaperSelf-aligned carbon nanotube transistors with novel chemical doping
- Jia Chen
- Christian Klinke
- et al.
- 2004
- IEDM 2004
Conference paperCarbon nanotube electronics and optoelectronics
- Ph. Avouris
- A. Afzali
- et al.
- 2004
- IEDM 2004
Conference paperPerformance data on new tunable attenuating PSM for 193nm and 157nm lithography
- Hans Becker
- Frank Schmidt
- et al.
- 2004
- Photomask and Next-Generation Lithography Mask Technology 2004
Conference paper