Immersion lithography: New opportunities for semiconductor manufacturing
- Darío Gil
- Timothy A. Brunner
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper
Publications
14465 results for Physical Sciences
Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
- Alex K. Raub
- A. Frauenglass
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperPreparation of SrRuO3 films for advanced CMOS metal gates
- K. Fröhlich
- K. Hušeková
- et al.
- 2004
- Materials Science in Semiconductor Processing
Conference paperUltrathin membrane, masks for electron projection lithography
- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperDynamics of vapor bubbles in spherically symmetric temperature fields of general variation
- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperDynamics of vapor bubbles in binary liquids with spherically symmetric initial conditions
- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperCoSi2 formation in the presence of Ti, Ta or W
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Thin Solid Films
PaperEvaluation of thermal stability for CMOS gate metal materials
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2004
- JES
PaperDielectric tunability of BST:MgO composites prepared by using nano particles
- Shashnk Agrawal
- R. Guo
- et al.
- 2004
- Ferroelectrics, Letters Section
PaperSecond-order normal force brought about by polishing with a polyurethane pad
- Maria Ronay
- 2004
- JES
Paper