Publications

26944 results for Science

Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II. a-SiN^x:H
- - F.C. Rong
  - E.H. Poindexter
- 2019
- JES
Paper
Conducting Transition Metal Oxides: Possibilities for RuO₂in VLSI Metallization
- - L. Krusin-Elbaum
  - M. Wittmer
- 2019
- JES
Paper
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF₄/O₂ Etching of Silicon
- - M. Dalvie
  - K.F. Jensen
- 2019
- JES
Paper
Constriction-Induced Local Electrodeposition The Principle of Self-Induced Repair
- - C. Julian Chen
- 2019
- JES
Paper
EFFECT OF Cu ON THE KINETICS AND MICROSTRUCTURE OF Al₃Ti FORMATION.
- - M. Wittmer
  - F. Le Goues
  - et al.
- 2019
- JES
Paper
Pairing Effects in the Luminescence Spectrum of Zn₂SiO₄:Mn
- - E.E. Mendez
  - E.A. Giess
  - et al.
- 2019
- JES
Paper
Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- - E. Tierney
  - J. Batey
  - et al.
- 2019
- JES
Paper
Electroactive properties of polyaromatic molecules
- - Joachim Bargon
  - A. Diaz
- 2019
- JES
Paper
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- - James H. Comfort
  - Rafael Reif
- 2019
- JES
Paper
The Ion Sensitivity of Boron Implanted Silicon Nitride Chemical Sensors
- - Yin Hu
  - Marvin H. White
- 2019
- JES
Paper