Directed self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Publications
24861 results for Exploratory Science
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- Hyun Chol Choi
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperBenchmarking study of 3D mask modeling for 2 and 1x nodes
- Chang An Wang
- Chao-Chun Liang
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperMonitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperDynamic QOS optimization architecture for cloud-based DDDAS
- Tao Chen
- Rami Bahsoon
- et al.
- 2013
- ICCS 2013
Conference paperDepth-controllable ultra shallow indium gallium zinc oxide/gallium arsenide hetero junction diode
- Seong-Uk Yang
- Seung-Ha Choi
- et al.
- 2013
- Journal of Alloys and Compounds
PaperOn the analytical properties of high-dimensional randomization
- Charu C. Aggarwal
- 2013
- IEEE TKDE
PaperClassification and adaptive novel class detection of feature-evolving data streams
- Mohammad M. Masud
- Qing Chen
- et al.
- 2013
- IEEE TKDE
PaperConstrained text coclustering with supervised and unsupervised constraints
- Yangqiu Song
- Shimei Pan
- et al.
- 2013
- IEEE TKDE
PaperAn accelerated first-order method for solving SOS relaxations of unconstrained polynomial optimization problems
- Dimitris Bertsimas
- Robert M. Freund
- et al.
- 2013
- Optimization Methods and Software
Paper