Dark field Double Dipole Lithography (DDL) for back-end-of-line processes
- M. Burkhardt
- Sean Burns
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Publications
9271 results for Computer Science
Building an immersion top coat from the ground up - Materials perspective
- Mahmoud Khojasteh
- Irene Popova
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperUse of starburst patterns in optical lithography
- M. Burkhardt
- Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Conference paperDistinguishing dose, focus and blur for lithography characterization and control
- Christopher P. Ausschnitt
- Timothy A. Brunner
- 2007
- SPIE Advanced Lithography 2007
Conference paperOntologies and rules in business models
- Mark H. Linehan
- 2007
- EDOC 2007
Workshop paperInapproximability results for combinatorial auctions with submodular utility functions
- Subhash Khot
- Richard J. Lipton
- et al.
- 2007
- Algorithmica (New York)
PaperA configuration management database architecture in support of IBM service management
- Hari Madduri
- Shepherd S.B. Shi
- et al.
- 2007
- IBM Systems Journal
PaperAn integration model for organizing IT service management
- John Black
- Christine Draper
- et al.
- 2007
- IBM Systems Journal
PaperUsing a model-driven transformational approach and service-oriented architecture for service delivery management
- Santhosh Kumaran
- Pete Bishop
- et al.
- 2007
- IBM Systems Journal
PaperIntegrated change and configuration management
- Christopher Ward
- Vijay Aggarwal
- et al.
- 2007
- IBM Systems Journal
Review