Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

High resolution x-ray photoelectron spectroscopy and INDO/S-CI study of the core electron shakeup states of pyromellitic dianhydride-4,4′-oxydianiline polyimide
- - Y. Nakayama
  - P. Persson
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Investigation of slider surfaces after wear using photoemission electron microscopy
- - Simone Anders
  - Thomas Stammler
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Plasma induced copolymerization of hexafluoropropylene and octafluoropropane
- - Pieter B. Leezenberg
  - Timothy C. Reiley
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Patterning of NiFe and NiFeCo in CO/NH₃ high density plasmas
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Current-induced nanochemistry: Local oxidation of thin metal films
- - R. Martel
  - Th. Schmidt
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Developments in equipment support technology
- - J.J. Sullivan
  - R. Gwizdak
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Effects of argon addition to a platinum dry etch process
- - K.R. Milkove
  - J. Coffin
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Localized degradation studies of ultrathin gate oxides
- - H.J. Wen
  - R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Copper diffusion in amorphous germanium
- - J. Doyle
  - A.Yu. Kuznetsov
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Electronic structure and electron emission of lithium-containing amorphous hydrogenated carbon films
- - J.-U. Thiele
  - P. Kania
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper