Patterning of CMOS device structures for 40-80nm pitches and beyond
- Sebastian U. Engelmann
- R.M. Martin
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- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
24861 results for Exploratory Science
A two-tier data-centric framework for flexible business process management
- Rong Liu
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- 2012
- AMCIS 2012
Conference paperTowards an agent-based symbiotic architecture for autonomic management of virtualized data centers
- Qi Liu
- Dilma Da Silva
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- 2012
- WSC 2012
Conference paperMeDetect: Domain entity annotation in biomedical references using linked open data
- Li Tian
- Weinan Zhang
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- 2012
- ISWC-Posters-Demos-Industry 2012
Conference paperAn integration path for gate-first UTB III-V-on-insulator MOSFETs with silicon, using direct wafer bonding and donor wafer recycling
- Lukas Czornomaz
- N. Daix
- et al.
- 2012
- IEDM 2012
Conference paperScalable and fully self-aligned n-type carbon nanotube transistors with gate-all-around
- Aaron D. Franklin
- Siyuranga O. Koswatta
- et al.
- 2012
- IEDM 2012
Conference paperExtending geospatial data to support epidemiological modeling
- Stefan Edlund
- Matthew Davis
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- 2012
- SIGSPATIAL GIS 2012
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- Flavio Bergamaschi
- Dave Conway-Jones
- 2012
- SPIE Defense + Security 2012
Conference paperRoom-temperature carrier transport in high-performance short-channel Silicon nanowire MOSFETs
- Amlan Majumdar
- Sarunya Bangsaruntip
- et al.
- 2012
- IEDM 2012
Conference paper22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL
- S. Narasimha
- P. Chang
- et al.
- 2012
- IEDM 2012
Conference paper