Failure prediction across process window for robust OPC
- Shumay D. Shang
- Yuri Granik
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paper
Publications
14462 results for Physical Sciences
Layout Optimization at the pinnacle of Optical Lithography
- Lars Liebmann
- Greg Northrop
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paperApplications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paperPore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
PaperUltrafine FePt Nanoparticles Prepared by the Chemical Reduction Method
- Kevin E. Elkins
- Tejaswi S. Vedantam
- et al.
- 2003
- Nano Letters
PaperApplication of blurring filters to improve detection of invisible image watermarks
- Gordon W. Braudaway
- Fred Mintzer
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paperColor Image Semantics for Digital Libraries
- Aleksandra Mojsilovic
- Bernice E. Rogowitz
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paperLearning to see, seeing to learn: Visual aspects of sensemaking
- Daniel M. Russell
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paperDigital Image Acquisition and Continuous Zoom Display from Multiple-Resolution Views Using Heterogeneous Image Pyramids
- Belle L. Tseng
- 2003
- VDA 2003
Conference paperPerceptual Color and Spatial Texture Features for Segmentation
- Junqing Chen
- Thrasyvoulos N. Pappas
- et al.
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paper