Publications

14465 results for Physical Sciences

Correlation of electromigration lifetime distribution to failure mode in dual Damascene Cu/SiLK interconnects
- - L. Gignac
  - C.-K. Hu
  - et al.
- 2003
- Microelectronic Engineering
Conference paper
Near edge x-ray absorption fine structure measurements of surface segregation in 157 nm photoresist blends
- - Erin L. Jablonski
  - Vivek M. Prabhu
  - et al.
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper
Electronic collective modes and superconductivity in layered conductors
- - A. Bill
  - H. Morawitz
  - et al.
- 2003
- Physical Review B - CMMP
Paper
Direct Thermal Patterning of Self-Assembled Nanoparticles
- - Hendrik F. Hamann
  - S.I. Woods
  - et al.
- 2003
- Nano Letters
Paper
Chemical amplification resists: Inception, implementation in device manufacture, and new developments
- - Hiroshi Ito
- 2003
- J Polym Sci Part A
Paper
Dynamic force spectroscopy using the frequency modulation technique with constant excitation
- - H. Hölscher
  - B. Gotsmann
  - et al.
- 2003
- Physical Review B - CMMP
Paper
On modeling accuracy of EMI problems using PEEC
- - Albert E. Ruehli
  - Giulio Antonini
- 2003
- EMC 2003
Conference paper
Solution of large transmission line type circuits using a new optimized waveform relaxation partitioning
- - Martin J. Gander
  - Albert E. Ruehli
- 2003
- EMC 2003
Conference paper
Nanoscale effects leading to non-einstein-like decrease in viscosity
- - Michael E. Mackay
  - Tien T. Dao
  - et al.
- 2003
- Nature Materials
Paper
Localized magnetic modification of permalloy using Cr⁺ ion implantation
- - L. Folks
  - R.E. Fontana
  - et al.
- 2003
- Journal of Physics D: Applied Physics
Paper