Towards implementation of a nickel silicide process for CMOS technologies
- C. Lavoie
- F.M. D'Heurle
- et al.
- 2003
- Microelectronic Engineering
Conference paper
Publications
14467 results for Physical Sciences
Near edge x-ray absorption fine structure measurements of surface segregation in 157 nm photoresist blends
- Erin L. Jablonski
- Vivek M. Prabhu
- et al.
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperReduced Cu interface diffusion by CoWP surface coating
- C.-K. Hu
- L. Gignac
- et al.
- 2003
- Microelectronic Engineering
Conference paperCorrelation of electromigration lifetime distribution to failure mode in dual Damascene Cu/SiLK interconnects
- L. Gignac
- C.-K. Hu
- et al.
- 2003
- Microelectronic Engineering
Conference paperElectronic collective modes and superconductivity in layered conductors
- A. Bill
- H. Morawitz
- et al.
- 2003
- Physical Review B - CMMP
PaperDirect Thermal Patterning of Self-Assembled Nanoparticles
- Hendrik F. Hamann
- S.I. Woods
- et al.
- 2003
- Nano Letters
PaperChemical amplification resists: Inception, implementation in device manufacture, and new developments
- Hiroshi Ito
- 2003
- J Polym Sci Part A
PaperDynamic force spectroscopy using the frequency modulation technique with constant excitation
- H. Hölscher
- B. Gotsmann
- et al.
- 2003
- Physical Review B - CMMP
PaperOn modeling accuracy of EMI problems using PEEC
- Albert E. Ruehli
- Giulio Antonini
- 2003
- EMC 2003
Conference paperSolution of large transmission line type circuits using a new optimized waveform relaxation partitioning
- Martin J. Gander
- Albert E. Ruehli
- 2003
- EMC 2003
Conference paper