Publications

14462 results for Physical Sciences

Structural demonstration of cost effective Isolation Trench fill for sub-110nm vertical trench DRAM and SOC applications
- - S.-W. Yang
  - W.-S. Liao
  - et al.
- 2003
- VLSI-TSA 2003
Conference paper
Novel techniques for scaling deep trench DRAM capacitor technology to 0.11 μm and beyond
- - P.S. Parkinson
  - K. Settlemyer
  - et al.
- 2003
- VLSI-TSA 2003
Conference paper
Microstructure and properties of ultrathin amorphous silicon nitride protective coating
- - Bing K. Yen
  - Richard L. White
  - et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Polymer dynamics and diffusive properties in ultra-thin photoresist films
- - Christopher L. Soles
  - Ronald L. Jones
  - et al.
- 2003
- Microlithography 2003
Conference paper
Does line edge roughness matter?: FEOL and BEOL perspectives
- - Qinghuang Lin
  - Chuck Black
  - et al.
- 2003
- Microlithography 2003
Conference paper
Phase transition in a swarm algorithm for self-organized construction
- - Henri Leung
  - Ravi Kothari
  - et al.
- 2003
- Physical Review E - SNSMP
Paper
Geiger mode operation of an In_0.53Ga_0.47As-In_0.52Al_0.48As avalanche photodiode
- - Gauri Karve
  - Xiaoguang Zheng
  - et al.
- 2003
- IEEE JQE
Paper
Nickel in silicon studied by electron paramagnetic resonance
- - B. Effey-Schwickert
  - M. Wiegand
  - et al.
- 2003
- Applied Physics A: Materials Science and Processing
Paper
Dynamic force spectroscopy using the frequency modulation technique with constant excitation
- - H. Hölscher
  - B. Gotsmann
  - et al.
- 2003
- Physical Review B - CMMP
Paper
Selective enhancement of contrast blocks for MPEG/JPEG image compression
- - Konstantin Y. Kupeev
  - Zohar Sivan
- 2003
- VCIP 2003
Conference paper