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- 2003
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14465 results for Physical Sciences
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- Taryl L. Kirk
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- 2003
- Nature Materials
PaperNeutron reflectivity on nanoporous poly(methylsilsesquioxane) thin films
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- Willi Volksen
- et al.
- 2003
- Chemistry of Materials
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- 2003
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- F. Vasiliu
- et al.
- 2003
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- Won Kyoung Choi
- et al.
- 2003
- JOM
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- Rudolf Tromp
- 2003
- Nature Materials
PaperDiffusion barrier properties of very thin TaN with high nitrogen concentration
- S.M. Rossnagel
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- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- 2003
- Journal of Materials Chemistry
PaperUse of interferometric lithography to characterize the spatial resolution of a photoresist film
- John A. Hoffnagle
- William D. Hinsberg
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- J. Photopolym. Sci. Tech.
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