Bridging CD metrology gaps of advanced patterning with assistance of nanomolding
- Narender Rana
- Dario Goldfarb
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
24861 results for Exploratory Science
Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paperConductive layer for charge dissipation during electron-beam exposures
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paperHigh order wafer alignment in manufacturing
- Michael Pike
- Nelson Felix
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperDose-focus monitor technique using CD-SEM and application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperEnhancing water permeability of fouling-resistant POSS-PEGM hydrogels using 'addition-extraction' of sacrificial additives
- Young-Hye La
- Ratnam Sooriyakumaran
- et al.
- 2012
- Journal of Membrane Science
PaperEngineering the spin-flip limited exciton dephasing in colloidal CdSe/CdS quantum dots
- Nicolò Accanto
- Francesco Masia
- et al.
- 2012
- ACS Nano
PaperState-of-the-art graphene high-frequency electronics
- Yanqing Wu
- Keith A. Jenkins
- et al.
- 2012
- Nano Letters
PaperSAPSC: Security architecture of private storage cloud based on HDFS
- Qingni Shen
- Yahui Yang
- et al.
- 2012
- AINA 2012
Conference paperEnhanced rail component detection and consolidation for rail track inspection
- Hoang Trinh
- Norman Haas
- et al.
- 2012
- WACV 2012
Conference paper