Charge trapping in high K gate dielectric stacks
- Sufi Zafar
- Alessandro Callegari
- et al.
- 2002
- IEDM 2002
Conference paper
Publications
14462 results for Physical Sciences
Examination of hole mobility in ultra-thin body SOI MOSFETs
- Zhibin Ren
- Paul M. Solomon
- et al.
- 2002
- IEDM 2002
Conference paperResist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
Conference paperShort-channel like effects in Schottky barrier carbon nanotube field-effect transistors
- J. Appenzeller
- J. Knoch
- et al.
- 2002
- IEDM 2002
Conference paperPercolation in dense storage arrays
- Scott Kirkpatrick
- Winfried W. Wilcke
- et al.
- 2002
- Physica A: Statistical Mechanics and its Applications
Conference paperSub-30 nm P+ abrupt junction formation in strained Si/Si1-xGex MOS device
- K.L. Lee
- J.O. Chu
- et al.
- 2002
- IEDM 2002
Conference paperHigh mobility p-channel germanium MOSFETS with a thin Ge oxynitride gate dielectric
- Huiling Shang
- Harald Okorn-Schmidt
- et al.
- 2002
- IEDM 2002
Conference paperEnhancement of KRS-XE for 50 keV advanced mask making applications
- Karen Petrillo
- David Medeiros
- et al.
- 2002
- SPIE Photomask Technology 2002
Conference paperExtreme scaling with ultra-thin Si channel MOSFETs
- Bruce Doris
- Meikei Ieong
- et al.
- 2002
- IEDM 2002
Conference paperMARS2: An advanced femtosecond laser mask repair tool
- Alfred Wagner
- Richard Haight
- et al.
- 2002
- SPIE Photomask Technology 2002
Conference paper