ICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paper
Publications
26917 results for Science
Spin-on organic hardmask for topo-patterned substrate
- Kazuhiko Komura
- Yoshi Hishiro
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperClosed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperEstimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- Benoit Seguin
- Henri Saab
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperMolecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperParametric estimation for window censored recurrence data
- Yada Zhu
- Emmanuel Yashchin
- et al.
- 2014
- Technometrics
PaperAsymmetric nested lattice samples
- Peter Z. G. Qian
- Youngdeok Hwang
- et al.
- 2014
- Technometrics
PaperQuantile periodogram and time-dependent variance
- Ta-Hsin Li
- 2014
- Journal of Time Series Analysis
PaperEuclidean distance geometry and applications
- Leo Liberti
- Carlile Lavor
- et al.
- 2014
- SIAM Review
PaperLesion classification using clinical and visual data fusion by multiple kernel learning
- Pavel Kisilev
- Sharbell Hashoul
- et al.
- 2014
- SPIE Medical Imaging 2014
Conference paper