Detection of sub-design rule physical defects using E-beam inspection
- Oliver D. Patterson
- Julie Lee
- et al.
- 2013
- IEEE Trans Semicond Manuf
Paper
Publications
26878 results for Science
Markov chain aggregation and its applications to combinatorial reaction networks
- Arnab Ganguly
- Tatjana Petrov
- et al.
- 2013
- Journal of Mathematical Biology
PaperImpact of sub-wavelength electromagnetic diffraction in optical lithography for semiconductor chip manufacturing
- Jaione Tirapu Azpiroz
- Alan E. Rosenbluth
- 2013
- IMOC 2013
Conference paper11 PFLOP/s simulations of cloud cavitation collapse
- Diego Rossinelli
- Babak Hejazialhosseini
- et al.
- 2013
- SC 2013
Conference paperDetection of false sharing using machine learning
- Sanath Jayasena
- Saman Amarasinghe
- et al.
- 2013
- SC 2013
Conference paperPractical nonvolatile multilevel-cell phase change memory
- Doe Hyun Yoon
- Jichuan Chang
- et al.
- 2013
- SC 2013
Conference paperSynchronised range queries in distributed simulations of multiagent systems
- Vinoth Suryanarayanan
- Georgios Theodoropoulos
- 2013
- ACM TOMACS
PaperBiodegradable broad-spectrum antimicrobial polycarbonates: Investigating the role of chemical structure on activity and selectivity
- Willy Chin
- Chuan Yang
- et al.
- 2013
- Macromolecules
PaperPVD Cu reflow seed process optimization for defect reduction in nanoscale Cu/Low-k dual damascene interconnects
- K. Motoyama
- O. Van Der Straten
- et al.
- 2013
- JES
PaperTribute to Professor D. S. Lieberman: On the importance of being invariant
- G.B. Olson
- D. Gupta
- 2013
- Journal of Alloys and Compounds
Paper