Ion beam annealing of semiconductors
- R.T. Hodgson
- J.E.E. Baglin
- et al.
- 2008
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Shallow silicide-to-silicon contacts: The case of amorphous-Pd 80Si20-to-silicon
- S. Kritzinger
- K.N. Tu
- 2008
- Applied Physics Letters
PaperNew high-resolution charge transfer x-ray and electron beam negative resist
- Donald C. Hofer
- Frank B. Kaufman
- et al.
- 2008
- Applied Physics Letters
PaperAnodic etching of p-type silicon as a method for discriminating electrically active and inactive defects
- H. Föll
- 2008
- Applied Physics Letters
PaperIonic species in a silane plasma
- Ivan Haller
- 2008
- Applied Physics Letters
PaperLaser annealing of silicon implanted with both argon and arsenic
- E. Rimini
- W.K. Chu
- et al.
- 2008
- Applied Physics Letters
PaperAmbient effects on the diffusion of Cr and Si in thin Pt films
- Chin-An Chang
- W.K. Chu
- 2008
- Applied Physics Letters
PaperTransition to faceting in multilayer liquid phase epitaxy of GaAs
- Hans J. Scheel
- 2008
- Applied Physics Letters
PaperJosephson junctions of small area formed on the edges of niobium films
- R.F. Broom
- A. Oosenbrug
- et al.
- 2008
- Applied Physics Letters
PaperElastic rubber-waveguide geodesic optical deflector
- Mark Johnson
- 2008
- Applied Physics Letters
Paper