Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- G.M. Cohen
- P.M. Mooney
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
14466 results for Physical Sciences
A genetic algorithm for the evaluation of material parameters of compound multilayered structures
- Thomas Zwick
- Jens Haala
- et al.
- 2002
- IEEE T-MTT
PaperNuclear quadrupole resonance study of the glassy AsxSe1-x system
- Eungho Ahn
- G.A. Williams
- et al.
- 2002
- Journal of Non-Crystalline Solids
PaperMolecular beam epitaxial growth and properties of CoFe2O4 on MgO(0 0 1)
- S.A. Chambers
- R.F.C. Farrow
- et al.
- 2002
- Journal of Magnetism and Magnetic Materials
PaperMagnetic reversal of perpendicularly-biased Co/Pt multilayers
- O. Hellwig
- S. Maat
- et al.
- 2002
- Physical Review B - CMMP
PaperMicromagnetic behavior of electrodeposited cylinder arrays
- M. Hwang
- M. Shima
- et al.
- 2002
- Physical Review B - CMMP
PaperCombinatorial methodologies offer potential for rapid research of photoresist materials and formulations
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCrystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
Conference paperCharacteristics of low-k and ultralow-k PECVD deposited SiCOH films
- A. Grill
- V.V. Patel
- et al.
- 2002
- MRS Proceedings 2002
Conference paperEvaluation of the chemical-mechanical planarization (CMP) performance of silicon nitride and silicon carbide as hard mask materials for Cu-based interconnect technology
- Wei-Tsu Tseng
- Jia Lee
- et al.
- 2002
- MRS Spring Meeting 2002
Conference paper