Kinetic effects in heteroepitaxial growth
- 2002
- Applied Surface Science
Paper
Publications
14462 results for Physical Sciences
Production of crosslinked, hollow nanoparticles by surface-initiated living free-radical polymerization
- Susanne Blomberg
- Sofia Ostberg
- et al.
- 2002
- J Polym Sci Part A
PaperAn efficient synthesis of symmetrical oligothiophenes: Synthesis and transport properties of a soluble sexithiophene derivative
- A. Afzali
- T.L. Breen
- et al.
- 2002
- Chemistry of Materials
PaperMethodology for generating exposure tool specification for alternating phase shift mask application for 70 nm node
- Kafai Lai
- Gregg Gallatin
- et al.
- 2002
- SPIE Advanced Lithography 2002
Conference paperMethods for comparing contact hole shrinking techniques with 248 nm single layer and bilayer photoresists
- Karen Petrillo
- John Simons
- et al.
- 2002
- Microlithography 2002
Conference paperBuilding high-performance chemically amplified resists with polymer blends
- Qinghuang Lin
- John Simons
- et al.
- 2002
- Microlithography 2002
Conference paperCharacterization of the polymer-developer interface in 193 nm photoresist polymers and formulations during dissolution
- Thomas Wallow
- Wendy Chan
- et al.
- 2002
- Microlithography 2002
Conference paperSensitivity factors of CAR electron beam resists
- David R. Medeiros
- Karen Petrillo
- et al.
- 2002
- Microlithography 2002
Conference paperThe evolution of load/unload technology
- M. Suk
- T.R. Albrecht
- 2002
- Microsystem Technologies
PaperDesign considerations for CMOS near the limits of scaling
- David J. Frank
- Yuan Taur
- 2002
- Solid-State Electronics
Paper