Scattered light: The increasing problem for 193 nm exposure tools and beyond
- Kafai Lai
- Chung-Hsi Wu
- et al.
- 2001
- Microlithography 2001
Conference paper
Publications
14466 results for Physical Sciences
Aids for driving lithography hard: Wafer level process control features
- Emily Fisch
- Reginald Bowley
- et al.
- 2001
- Microlithography 2001
Conference paperInspection and repair of EUV
- Emily Fisch
- Louis Kindt
- et al.
- 2001
- SPIE Photomask 2001
Conference paperAn application-based perspective on universal multimedia access using MPEG-7
- John R. Smith
- Vamsavardhana R. Chillakuru
- 2001
- ITCom 2001
Conference paperCarbon nanotube field effect transistors for logic applications
- Richard Martel
- Hon-Sum Philip Wong
- et al.
- 2001
- IEDM 2001
Conference paperSolution of large differential signal problem using two different integral equation based methods
- A.E. Ruehli
- J. Esch
- et al.
- 2001
- EMC 2001
Conference paperMeasured performance of a refractive Gauss-to-flattop reshaper for deep-UV through near-IR wavelengths
- John A. Hoffnagle
- C. Michael Jefferson
- 2001
- SPIE Optical Science and Technology 2001
Conference paperElectrodes and barriers for dram and feram: Processing, integration, and fundamentals
- K.L. Saenger
- P.C. Andricacos
- et al.
- 2001
- MRS Online Proceedings Library
Conference paperInvestigation of the numerical accuracy of transmission line-based transient analysis of high-speed interconnects and cables
- Andreas C. Cangellaris
- Karen M. Coperich
- et al.
- 2001
- EMC 2001
Conference paperTransient analysis of printed circuit board problem using two different solvers
- A.E. Ruehli
- G. Papadopoulos
- et al.
- 2001
- EMC 2001
Conference paper