A self-aligned silicide process for thin silicon-on-insulator MOSFETs and bulk MOSFETs with shallow junctions
- G.M. Cohen
- C. Cabral Jr.
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- 2001
- MRS Proceedings 2001
Conference paper
Publications
14462 results for Physical Sciences
Morphological instability theory for strained alloy film growth: The effect of compositional stresses and species-dependent surface mobilities on ripple formation during epitaxial film deposition
- B.J. Spencer
- P.W. Voorhees
- et al.
- 2001
- Physical Review B - CMMP
PaperCharge-induced dephasing in thin polythiophene films
- W. Schrof
- V. Belov
- et al.
- 2001
- Physical Review B - CMMP
PaperFormation of mixed layers derived from functional silicon oxide clusters on gold
- Kenneth T. Nicholson
- Kangzhan Zhang
- et al.
- 2001
- Langmuir
PaperOn the spin origin of the pseudogap in high-Tc superconductors
- L. Krusin-Elbaum
- T. Shibauchi
- et al.
- 2001
- Physica C: Superconductivity and its Applications
PaperContactless testing of wiring networks by an electron beam system utilizing induced current detection
- S.D. Golladay
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPREVAIL-EPL alpha tool: Early results
- S.D. Golladay
- H.C. Pfeiffer
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperAnalysis of power/ground-plane EMI decoupling performance using the partial-element equivalent circuit technique
- Bruce Archambeault
- Albert E. Ruehli
- 2001
- IEEE Trans Electromagn Compat
PaperNanoscale patterning using self-assembled polymers for semiconductor applications
- K.W. Guarini
- C.T. Black
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperDynamical study of remanent magnetization in nanoparticles
- G. Grinstein
- G.A. Held
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
Paper