A high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
14462 results for Physical Sciences
Interfacial reaction pathways and kinetics during annealing of 111-textured Al/TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study
- J.-S. Chun
- P. Desjardins
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
PaperTribochemistry between hydrogen and diamond-like carbon films
- J. Fontaine
- C. Donnet
- et al.
- 2001
- Surface and Coatings Technology
PaperContinuum and atomistic studies of intersonic crack propagation
- Huajian Gao
- Yonggang Huang
- et al.
- 2001
- Journal of the Mechanics and Physics of Solids
PaperSurface Segregation of Al of the Bilayers of Pure Cu and Cu-Al Alloy Films
- Pei-I. Wang
- S.P. Murarka
- et al.
- 2001
- JES
PaperWhy hot carrier emission based timing probes will work for 50 nm, 1V CMOS technologies
- J.C. Tsang
- M.V. Fischetti
- 2001
- Microelectronics Reliability
PaperEnhancement of Semiconductor Wafer Cleaning by Chelating Agent Addition
- Glenn W. Gale
- David L. Rath
- et al.
- 2001
- JES
PaperPerpendicular magnetic anisotropy in ultrathin yttrium iron garnet films prepared by pulsed laser deposition technique
- E. Popova
- N. Keller
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
PaperThe atomic dynamics of fracture
- Farid F. Abraham
- 2001
- Journal of the Mechanics and Physics of Solids
PaperPhase boundary fluctuations on Si(111)
- J.B. Hannon
- R.M. Tromp
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Paper