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- Nanotechnology
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Publications
24861 results for Exploratory Science
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- 2011
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- 2011
- SPIE Advanced Lithography 2011
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- SPIE Advanced Lithography 2011
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- 2011
- SPIE Advanced Lithography 2011
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- 2011
- SPIE Advanced Lithography 2011
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- SPIE Advanced Lithography 2011
Conference paperExtending photo-patternable low-κ concept to 193 nm lithography and e-beam lithography
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- 2011
- SPIE Advanced Lithography 2011
Conference paper