Automated search method for AFM and profilers
- Michael Ray
- Yves C. Martin
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
14466 results for Physical Sciences
Feature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering
- Eric K. Lin
- Wen-li Wu
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper1/f noise in insulating YBa2Cu3O7-δ
- F.P. Milliken
- R.H. Koch
- 2001
- Physical Review B - CMMP
PaperA high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask and device making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperTunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperInfluence of randomly oriented columnar defects on the irreversible and reversible magnetization of Tl2Ba2CaCu2Ox superconductor
- J.G. Ossandon
- J.R. Thompson
- et al.
- 2001
- Supercond Sci Technol
Conference paperDendritic-linear AxBx block copolymers prepared via controlled ring-opening polymerization of lactones from orthogonally protected multifunctional initiators
- Andreas Würsch
- Michael Möller
- et al.
- 2001
- Macromolecules
PaperSystematics of (formula presented) electron energies relative to host bands by resonant photoemission of rare-earth ions in aluminum garnets
- C.W. Thiel
- H. Cruguel
- et al.
- 2001
- Physical Review B - CMMP
PaperHydrophilic poly(dimethylsiloxane) stamps for microcontact printing
- C. Donzel
- M. Geissler
- et al.
- 2001
- Advanced Materials
PaperA surface-emitting circular grating polymer laser
- C. Bauer
- H. Giessen
- et al.
- 2001
- Advanced Materials
Paper