Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
14462 results for Physical Sciences
Influence of randomly oriented columnar defects on the irreversible and reversible magnetization of Tl2Ba2CaCu2Ox superconductor
- J.G. Ossandon
- J.R. Thompson
- et al.
- 2001
- Supercond Sci Technol
Conference paperDendritic-linear AxBx block copolymers prepared via controlled ring-opening polymerization of lactones from orthogonally protected multifunctional initiators
- Andreas Würsch
- Michael Möller
- et al.
- 2001
- Macromolecules
PaperSystematics of (formula presented) electron energies relative to host bands by resonant photoemission of rare-earth ions in aluminum garnets
- C.W. Thiel
- H. Cruguel
- et al.
- 2001
- Physical Review B - CMMP
PaperHydrophilic poly(dimethylsiloxane) stamps for microcontact printing
- C. Donzel
- M. Geissler
- et al.
- 2001
- Advanced Materials
PaperA surface-emitting circular grating polymer laser
- C. Bauer
- H. Giessen
- et al.
- 2001
- Advanced Materials
PaperGrowth morphology in the Co/Cu(0 0 1) system
- J. Fassbender
- A. Bischof
- et al.
- 2001
- Surface Science
PaperControlling and plasma- and process- induced damage
- T.B. Hook
- 2001
- Semiconductor International
PaperCombinatorial device fabrication and optimization of multilayer organic LEDs
- Tilman A. Beierlein
- Hans-Peter Ott
- et al.
- 2001
- Proceedings of SPIE 2001
Conference paperPerformance characterization of a data mining application via hardware-based monitoring
- Mathew Thoennes
- Charles Weems
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper